Liquid Temperature Control System CLEANSTREAM
By directly controlling the temperature of the medication flow tube, we can reduce power consumption by 95% compared to conventional indirect temperature control methods!
Temperature management of the cleaning solution used in semiconductor manufacturing is a crucial factor that affects product quality and productivity. This device, utilizing a Peltier module, controls the temperature of the cleaning solution to ±0.05°C. It is a very compact module that directly controls the temperature of the flow path tube, allowing for a reduction in usage by 10-30% compared to traditional tanks that regulate the solution temperature. Furthermore, due to its simple structure with no moving parts, it operates without vibration or noise and requires almost no maintenance. Temperature control is managed with a separately sold dedicated controller.
- Company：エムエス機器
- Price：Other
